Miniaturized humidity sensors combined with ZigBee transceiver
and efficient data processing offer a powerful system for the monitoring of
human breath. Every 10 ms, the expiration/ inspiration phase is transmitted,
allowing a medical diagnosis as efficient as required by the application. For
the sensing system, a micro interdigitated capacitor, covered with a dense
hydrophilic alumina layer, is connected to a capacitance-to-frequency circuit interface.
A customized nasal canula-prototype embeds the microsystem underneath the
patient’s nostrils while offering cabling until the belt-fixed radio transceiver.
The fast data processing, executed in a mini notebook process unit, gives to
the medical staff a live broadcast of the patient’s respiratory rate. In order to
improve the size and the functionality of our sensing module, novel techniques
for processing complementary metal oxide semiconductor (CMOS) in
Silicon-on-Insulator (SOI) technology now allow for the construction of
microsensors and CMOS circuits together on the same chip. These sensors consume
extremely low power, of the order of 0.1 , present high sensitivity, occupy small chip
area (1.25 __) and offer the prerequisite
platform for a large variety of new sensors.
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